Automatic tembiricha uye humidity control
Kupisa uye hunyoro hwekamuri rakachena zvinonyanya kutemwa zvinoenderana nezvinodiwa nemaitiro, asi pasi pemamiriro ekuti zvinodiwa nemaitiro zvinosangana, kunyaradza kwevanhu kunofanirwa kutariswa.Nekuwedzera kwezvinodiwa zvehutsanana hwemhepo, pane maitiro ekuti maitiro acho ane zvakawanda uye zvakanyanya kuomesesa zvinodiwa pane tembiricha uye hunyoro.
Sezvo kunyatsoita machining kuri kuramba kuchiwedzera kunaka, izvo zvinodikanwa zvetembiricha yekuchinja kwemhando iri kuita diki nediki.Semuenzaniso, muiyo lithography exposure process yeyakakura-yakakura yakabatanidzwa yedunhu kugadzirwa, musiyano pakati peiyo thermal yekuwedzera coefficient yegirazi uye silicon wafer sechinhu cheiyo diaphragm chinodiwa kuve chidiki uye diki.Siricon wafer ine dhayamita ye100μm ichaita kuti mutsara uwedzere 0.24μm kana tembiricha yakwira ne1 degree.Nokudaro, inofanira kuva nekushisa kwe ± 0.1 degrees.Panguva imwecheteyo, hunyoro hunokosha hunowanzodiwa hushoma, nokuti mushure mokunge munhu adikitira, chigadzirwa chichasvibiswa, kunyanya Kune semiconductor workshops vanotya sodium, rudzi urwu rwemusangano wakachena haufaniri kudarika 25 degrees.
Kunyanya kunyorova kunokonzera mamwe matambudziko.Kana hunyoro hwehukama hunopfuura 55%, condensation ichaitika pamadziro epombi yemvura inotonhorera.Kana zvikaitika mune chaiyo mudziyo kana dunhu, zvinokonzeresa tsaona dzakasiyana.Zviri nyore kuita ngura kana hunyoro huri 50%.Mukuwedzera, kana hunyoro hwakanyanyisa, guruva riri pamusoro pesilicon wafer richave rakashongedzwa nemakemikari nemamorekuru emvura ari mumhepo kusvika kumusoro, izvo zvakaoma kubvisa.Kukwirira kwehunyoro hwehukama, ndiko kunonyanya kuoma kubvisa kunamira, asi kana hunyoro hwehukama hwadzikira kupfuura 30%, zvimedu zviri nyore kuvharika pamusoro nekuda kwekuita kwesimba remagetsi, uye nhamba huru yesemiconductor. midziyo iri nyore kuparara.Iyo yakanyanya tembiricha yemhando yesilicon wafer kugadzirwa ndeye 35 ~ 45%.
